PostFlex Demonstrated Results



 
Introduction Process Flow Applications Examples
 

  • The PostFlex Process produces high quality thin film transistors on flexible polymer substrates.
  • Electrical characteristics of separated p-channel poly-Si TFTs made with metal induced lateral crystallization and high temperature gate oxidation (W = L = 4um)
Threshhold voltage, Vth -1.1 V
Field effect hole mobility 174 cm2/V.S.
Minimum-off current <0.5x10-11 A/um @ Vds= -.1V
Sub-threshold swing 200 mV/dec
Maximum on/off ratio > 108 @ Vds = -.1V

Y.Lee, H. Li and S. Fonash,
IEEE Electron Device Letters, Jan. 2003



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