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Types of Gas Sensors:
- 2-D nano-wire arrays
- Deposited nano-structured materials
- Can incorporate:
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CMOS devices |
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Microfluidics: micro-channel chemical delivery |
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Flexible substrates |
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Column Void Films -- Enable Sensor Structures
Provides:
- Large surface area
- Pore size and porosity are controllable
- Low temperature process
(≈ 100 C˚) compatible with :
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Si technology |
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Glass substrates |
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Plastic substrates |
- In sensor applications, allows lateral monitoring
- Topology affect cell, protein and molecular adhesion
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